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Rutherford Backscattering Spectrometry for Thin Film Analysis

In thin film analysis, the total energy loss directly correlates to the depth, and the relation between the signal’s energy width (∆E) of a thin film of thickness ∆t is given by: In the above equation, k is the kinematic factor and the subscript “in” and “out” refer to the average incoming and outgoing energy for the α-particles.